Stark broadening experiments on a vacuum arc discharge in tin vapor
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چکیده
منابع مشابه
Stark broadening experiments on a vacuum arc discharge in tin vapor.
Pinched discharge plasmas in tin vapor are candidates for application in future semiconductor lithography tools. This paper presents time-resolved measurements of Stark broadened linewidths in a pulsed tin discharge. Stark broadening parameters have been determined for four lines of the Sn III spectrum in the range from 522 to 538 nm, based on a cross-calibration to a Sn II line with a previous...
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ژورنال
عنوان ژورنال: Physical Review E
سال: 2004
ISSN: 1539-3755,1550-2376
DOI: 10.1103/physreve.70.066402